Overlay Metrology Equipment
GANYMEDE Series
WSTC GANYMEDE is a standalone, fully automatic system for high-precision alignment metrology. It can also be integrated as an in-situ module into CANOPUS or SIRIUS bonders. The system measures the alignment accuracy between alignment marks post bonding and provides feedback for optimizing bonding process recipes.
Features
Compatible with Transmission/Reflection Modes
Compatible with W2W and D2W Metrology
Wafer Full-Coverage Metrology (Full Map)
Intelligent Recognition Algorithm
Super-Resolution Imaging Algorithm
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